Application of Ultra-precision Machining Technology in Micro-optical Component Manufacturing

Abstract: Ultra-Precision Machining technology, as a manufacturing method of micro-optical components, has many advantages that other conventional methods do not have. This paper reviews the development of ultra-precision machining technology and looks forward to its potential application in the processing of micro-optical components.

1 Micro-optical Overview 1.1 Definition and Name Micro-optics is an emerging science that belongs to the intersection of multiple frontier disciplines. With the latest research results of microelectronics industry technology, micro-optics is one of the most advanced research directions in the world and has a wide application prospect. Micro-optical components (MOC) are free-optical curved surfaces and microstructured optical components with surface-accuracy up to sub-micron dimensions and surface roughness up to nanometers. The free optical surface includes a rotating aspheric surface with a rotary axis (such as a paraboloid, an involute surface, etc.), and a non-rotating aspheric surface without any axis of symmetry, such as a Zernike aberration equation surface. Microstructure refers to the tiny surface topological shape with specific functions, such as grooves, microlens arrays, etc., as shown in Figure 1 (Figure 1 omitted)

Micro-pyramid structure surface. These structures determine the reflection, transmission or diffraction properties of the light, allowing the optical designer to optimize the optical system, reduce weight and reduce volume. Typical micro-optical components such as holographic lenses, diffractive optical elements (DOE) and gradient-index lenses, etc., can be used in a variety of optoelectronic instruments to make optoelectronic instruments and their components more compact, array and integrated. Turn.

1.2 Application of micro-optical components Micro-optical components are the key components in the manufacture of small-scale optoelectronic subsystems. They have the advantages of small size, light weight, low cost, and can realize micro, array, integration, imaging and wavefront conversion that are difficult to achieve with common optical components. Wait for new features. As the miniaturization of the system continues to become a trend, it is used in almost all engineering applications, both in the field of modern defense science and technology, and in the general industrial field. On the military side, military photoelectric systems developed and produced by Western countries after the 1970s, such as military laser devices, thermal imaging devices, low-light night vision helmets, infrared scanning devices, missile guides, and various zoom lenses, have been used to varying degrees. Aspherical optical parts are used. In the general civil photovoltaic system, free aspherical parts can be applied to a variety of optoelectronic imaging systems. Such as the display system that provides flight information in the aircraft; the viewfinder and zoom lens of the camera; the 锗 lens in the infrared wide-angle horizon; the microscope objective read-out head for recording and recording; the indirect ophthalmoscope for medical diagnosis, the endoscope, progressive Lens and the like. Microstructured optical components are used in a wide variety of applications, such as microslot structures in fiber optic connectors, microlens arrays for liquid crystal displays, F-theta lenses for laser scanning, beam splitters for laser heads, etc. It is used in many of the products we use every day, such as mobile phones, PDAs, CDs and DVDs.

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