Application of Ultra-precision Machining Technology in Micro-optical Component Manufacturing (3)

2.2 Application examples The development of electronic technology and optical technology has greatly promoted the application of free aspherical and other non-traditional geometry micro-structured optical components. The emergence of some optical design software makes it easy for optical designers to optimize the performance of optical systems, but it also complicates optical components, which requires micro-optical component manufacturing technology to process these complex optical components. . For micro-optical component designers and manufacturers, single-crystal diamond ultra-Precision Machining technology has many advantages, such as the ability to process true three-dimensional structures; the forming accuracy of the machined parts is sub-micron; the surface roughness reaches Ra value of 5 nm. Some materials can even reach 1nm; they can process structures with large aspect ratios. Therefore, in the past ten years, the application examples of ultra-precision machining technology in the processing of micro-optical components are gradually increasing. Such as single crystal diamond ultra-precision processing technology has been successfully applied to the processing of contact lenses, prisms, aspherical lenses, microlens arrays, pyramid microstructure surfaces, anti-reflective gratings and other structures. Figure 2 shows the microstructure of a single crystal diamond lathe (Figure 2 is omitted). Although ultra-precision machining technology has many advantages for the processing of some structural optical components, combining ultra-precision machining technology with replication molding technology may be the most effective way to process micro-optical components, that is, using ultra-precision machining technology to process replica molds. Then, the mold is used to fabricate a micro-optical element. To process optical component molds with single crystal diamond lathes, it is necessary to select appropriate processing parameters to reduce burrs, reduce mold errors, and to machine suitable diamond tools. Fresnel lenses made with diamond lathes have been used in overhead projectors for great success, as shown in Figure 3 (Figure 3).



3 summarizes the development of micro-optics technology for micro-optics manufacturing technology put forward higher requirements, ultra-precision machining technology, through the rapid development of the past ten years, with many conventional optical fabrication techniques Advantages such as lithography and LIGA technology: 1 can process true three-dimensional structure with nanometer precision; 2 can process floating alignment structure on mold; 3 can process different depths on the same component The structure of the width ratio. In the field of micro-optics manufacturing, many similar products are processed by many different methods, which illustrates the immaturity of micro-optical manufacturing technology, although the application of ultra-precision machining technology in micro-optical components and their mold processing has A lot of advantages, but still in the initial stage of development. Therefore, ultra-precision machining technology has great potential for development. We believe that the combination of ultra-precision machining technology and replication molding technology will definitely promote the development of micro-optics and its integration technology.

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